Three-dimensional profile measuring equipment



(57)【要約】 【課題】 従来の3次元形状測定装置では、測定した領 域が被測定物のどこにあるか測定できない。誤差形状が 大きくなり、1マイクロメートル以下の形状測定には不 都合がある。接触球の真球度誤差、プローブの追従誤差 が測定精度を悪化させる等の課題があった。 【解決手段】 被測定物に設けた3つの球と、この3つ の球の中心位置を測定する中心位置測定部と、前記被測 定物表面上の点群を測定する点群測定部と、前記3つの 球の中心位置から被測定物の形状定義座標系の位置を計 算する位置計算部と、前記被測定物の表面上の点群を形 状定義座標系に座標変換する座標変換計算部と、前記座 標変換した測定結果に対して設計座標系位置を推定計算 する推定計算部とを備えたものである。
PROBLEM TO BE SOLVED: To measure the position and attitude of a surface to be measured with respect to a fixing reference by determining the position of a profile definition coordinate system from the central positions of three balls provided in an article to be measured, converting the position of a point group on the surface of the article into the position of the profile definition coordinate system and estimating the position of design coordinate. SOLUTION: A spherical face data acquisition means 20 traces spherical faces 7a-7c two-dimensionally by means of a probe, a spherical curve fit unit 21 determines the central position of each sphere and a coordinate conversion matrix calculator 22 determines the definition coordinate of spherical profile. A coordinate acquisition unit 23 acquires the coordinate of point group by tracing a face 1a to be measured two-dimensionally by means of a probe 6 and a coordinate converter 24 determines a profile definition coordinate. A normal vector calculator 25 determines a normal vector from a measured point group and a contact point position corrector 26 determines a contact point position based on the normal vector and the sphericality data 27 of a probe ball. A setting error corrector 28 calculates a profile error 30 and a setting error 31 based on the contact point and the design profile of a block 29.




Download Full PDF Version (Non-Commercial Use)

Patent Citations (0)

    Publication numberPublication dateAssigneeTitle

NO-Patent Citations (0)


Cited By (19)

    Publication numberPublication dateAssigneeTitle
    CN-103376076-AOctober 30, 2013鸿富锦精密工业(深圳)有限公司, 鸿海精密工业股份有限公司Three-dimensional probe compensation and space error measuring system and method
    EP-1818647-A2August 15, 2007Mitutoyo CorporationFormmesssystem, Formmessverfahren und Formmessprogramm
    EP-1818647-A3January 21, 2009Mitutoyo CorporationForm measuring instrument, form measuring method and form measuring program
    JP-2002250621-ASeptember 06, 2002Olympus Optical Co Ltd, オリンパス光学工業株式会社光学素子及びその型の形状測定方法及び装置
    JP-2002250622-ASeptember 06, 2002Olympus Optical Co Ltd, オリンパス光学工業株式会社光学素子及びその型の形状測定方法及び装置
    JP-2002357415-ADecember 13, 2002Matsushita Electric Ind Co Ltd, 松下電器産業株式会社形状測定装置及び方法、被測定物の製造方法
    JP-2007333575-ADecember 27, 2007Matsushita Electric Ind Co Ltd, 松下電器産業株式会社形状測定方法
    JP-2008039455-AFebruary 21, 2008Matsushita Electric Ind Co Ltd, 松下電器産業株式会社形状測定方法及び測定用治具
    JP-2009002771-AJanuary 08, 2009Nsk Ltd, 日本精工株式会社Shape measurement method of article and measuring instrument
    JP-2009539113-ANovember 12, 2009クオリティー ヴィジョン インターナショナル インコーポレイテッドQuality Vision International, Inc.測定の不確実性を考慮した多次元測定データの公差域への適合
    JP-2011117766-AJune 16, 2011Canon Inc, キヤノン株式会社干渉計測方法
    KR-100998311-B1December 03, 2010정제교Method for synchronization of working coordinates by detecting haptic reference points
    KR-101119926-B1March 16, 2012이태경Apparatus and method for synchronization of coordinates using haptic device
    KR-101227650-B1January 30, 2013이태경, 정제교Apparatus for Detection of Reference from Marker and Methodology for Image Merging and Synchronization of Coordination thereof
    KR-101240324-B1March 07, 2013이태경, 정제교Multi-axis machine having detecting mechanism of haptic reference points
    KR-101300224-B1August 26, 2013이태경, 정제교Device for synchronization of coordinates among various instruments which have their own coordinates systems respectively
    KR-101344472-B1December 24, 2013정제교, 이태경다축 가공기
    US-7542872-B2June 02, 2009Mitutoyo CorporationForm measuring instrument, form measuring method and form measuring program
    WO-2012015110-A1February 02, 2012Jung Je-KyoMethod for processing-coordinate synchronisation by means of haptic marker point detection